Silicon wafer crystal technology for ULSI.
نویسندگان
چکیده
منابع مشابه
Wafer Inspection Technology Challenges for ULSI Manufacturing
The use of wafer inspection systems in managing semiconductor manufacturing yields is described. These systems now detect defects of size as small as 40 nm. Some high-speed systems have achieved 200-mm diameter wafer throughputs of 150 wafers per hour. The particular technologies involved are presented. Extensions of these technologies to meet the requirements of manufacturing integrated circui...
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ژورنال
عنوان ژورنال: Bulletin of the Japan Institute of Metals
سال: 1989
ISSN: 0021-4426,1884-5835
DOI: 10.2320/materia1962.28.7